| 摘要 |
<p>A substrate processing apparatus (10) having a substrate transfer chamber (12), substrate processing modules (14) attached to the exterior of the chamber, a substrate transfer robot (22) connected to the chamber, and a substrate holder (32) located in the chamber. The robot can transport substrates among the various processing modules and the substrate holder. The substrate holder can be movably connected to the chamber and include a position vertically above or below at least one of the processing modules. A sub-enclosure member (36) can be movably connected to the chamber for positioning at an entrance aperture into the chamber when the entrance is opened, to prevent the interior of the entire chamber from being exposed to the open entrance aperture.</p> |
