CIRCULAR OR ANNULAR COATING FILM FORMING METHOD

摘要

A method of forming a circular or annular coating film on a substrate (W) using a device of simple structure without using coating liquid wastefully, comprising the steps of, using a painting device (A) formed of a rotatable table (1) suckingly holding the substrate (W) horizontally and a horizontally movable nozzle (10) liftable relative to the table (1) and having a delivery hole (10a) at the tip part thereof, rotating the table (1) and supplying coating liquid from the delivery hole (10a) in a linear state on to the substrate (W) while moving the nozzle (10) by a specified interval between the rotating center of the table (1) and an outward specified position in one direction with the nozzle (10) held at a specified height relative to the rotating table (1) so as to form a circular or annular coating film on the substrate (W).