METHOD AND UNIT FOR CHANGING DIRECTION OF SUBSTRATE BEING CARRIED

摘要

PROBLEM TO BE SOLVED: To reduce tact time loss by providing a unit for changing direction of a substrate being carried movably in the vertical direction at a position on the outside of a turning range about the axis of a robot arm where the substrate being carried can be supported. SOLUTION: A large glass substrate 1 is received by a robot 2 from a preceding process and transferred to the axial position of the robot 2 where the arm 10 of a substrate direction changing unit 9 is set at an elevated position. A robot arm 8 is then lowered and the substrate 1 is transferred onto the unit arm 10 before the robot arm 8 is lowered to a position where it does not interfere with the unit arm 10. Thereafter, direction of the substrate 1 is changed by the robot arm 8 and the substrate 1 mounted on the unit arm 10 is lifted. Thereafter, the unit arm 10 is lowered to the outside of the turning region of the robot arm 8 which is turned and transferred to the position for feeding a substrate thus feeding the substrate 1 to the unit side.