| 摘要 |
PROBLEM TO BE SOLVED: To prevent the escape of an image even in the case of the non-conformance of the rotating center with the image center by moving X-Y stages according to the distance L between the central position of an observing image and the rotating center and the rotating angle, controlling the moving speed of the X-Y stages according to the length of the distance L, and rotating the image about the center of an observation screen. SOLUTION: An image is operated so that the center of the image is located in an observing image center Cd even if a mechanical rotation is performed. For this, an X-stage is moved by -X' in X-direction, and a Y-stage is moved by -Y' in Y-direction by mechanical stage rotation. The slippage (X, Y) from the mechanical rotating center Cm is determined, and the distance L and angleθbetween the rotating center Cm and the image center Cd are calculated to determine correction quantities X', Y'. The image can be rotated about the image center by mechanical rotation even if the rotating center Cm is shifted from the image center Cd, and the distance L is linked with the moving speeds of the X, Y-stages so that the rotating speed in the image surface is constant regardless of the distance L.
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