| 摘要 |
PROBLEM TO BE SOLVED: To accurately perform measurement with a scanning probe microscope for observing aμm-class fine target without causing a probe to be worn out. SOLUTION: The scanning probe microscope is provided with an XY scanner 12 for performing the scanning of a sample surface by a probe 14, a piezoelectric element 18 for retracting the probe from the sample surface in the move between sampling positions while bringing the probe closer to the sample surface at the sampling positions, a piezoelectric element 17 for servo that maintains the distance between the probe and the sample surface at a set reference distance based on a servo control system due to a measuring operation at the sampling positions, and a control device 25 for retaining the state of the piezoelectric element for servo by a voltage corresponding to a measured value at the sampling positions immediately before the probe travels between the sampling positions. A measuring point is determined as a plurality of discrete sampling positions at a fixed interval, and the probe travels while being separated from the sample surface being retracted when traveling between the sampling positions.
|
