发明名称 |
SINGLE MODE OPERATION OF MICROELECTROMECHANICALLY TUNABLE, HALF-SYMMETRIC, VERTICAL CAVITY SURFACE EMITTING LASERS |
摘要 |
A method is provided for fabricating a microelectromechanically tunable vertical-cavity surface-emitting laser (4) with precise lateral and vertical dimensional control. MEM-tunable VCSEL structures are provided which include a gain medium (6) located in a mechanically tunable high-Q Fabry-Perot cavity (8) formed by an upper (12) and lower (10) reflective dielectric film stack. Tuning is achieved by translational movement of the upper cavity-tuning reflective dielectric film stack (12) in a controlled electrostatic field. T he current invention deals with the intracavity electrical contacts for current injection for this type of the MEM-tunable VCSEL. The current invention also includes various mechanisms to control the current injection profile so as t o ensure single mode operation throughout the tuning range of the MEM-tunable VCSEL.
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申请公布号 |
CA2380742(A1) |
申请公布日期 |
2001.02.08 |
申请号 |
CA20002380742 |
申请日期 |
2000.07.28 |
申请人 |
CORETEK, INC. |
发明人 |
VAKHSHOORI, DARYOOSH;TAYEBATI, PARVIZ;WANG, PEIDONG |
分类号 |
H01S5/00;H01S5/02;H01S5/10;H01S5/14;H01S5/183;(IPC1-7):H01S5/00 |
主分类号 |
H01S5/00 |
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