STRUCTURE OF CATHODE PART IN PLASMA ION INJECTOR

摘要

PURPOSE: A structure of a cathode part in a plasma ion injector is provided to enhance an electric characteristic and a mechanical characteristic by improving a structure of a cathode part of a plasma ion injector. CONSTITUTION: A power supply line(12) passing an inside of a cathode part is covered by a ceramic ring(31). A multitude of metal cap(32) having a saw-toothed section is installed on an outer circumference of the ceramic ring(31). A multitude of metal plate(34) is formed to a lower direction of the metal caps(32). A ceramic cylinder(33) having a predetermined height is installed around the metal caps(32). The ceramic cylinder(33) is formed by a ceramic material. The ceramic cylinder(33) is used for preventing a coating action of metal ions on the ceramic ring(31). In addition, the metal ions emitted from each metal material are induced to the saw-toothed section of the metal cap(32).