发明名称 APPARATUS MONITORING THE DEPOSITION OF A LIQUID-TO-PASTY MEDIUM ON A SUBSTRATE
摘要 The invention relates to apparatus monitoring the deposition of a liquid-to- pasty medium on a substrate and comprising at least one sensor fitted with two electrodes which are configured at a given, slight distance from the substrate surface and which apply an AC voltage to the substrate and medium, the substrate moving relative to the sensor, further comprising a test electronics connected to the sensor and emitting a signal which is characteristic of the substrate together with the medium. This problem is solved in that the apparatus measures the imaginary component of the substrate together with th e medium between the two electrodes and thereupon the test electronics uses this measured value to determine the characteristic signal.
申请公布号 CA2314813(A1) 申请公布日期 2001.02.07
申请号 CA20002314813 申请日期 2000.08.02
申请人 ITW INDUSTRIE GMBH 发明人 BLANK, ANDREAS
分类号 G01R27/26;B05C11/02;G01B7/06;G01N27/22;G01N33/32;H01L21/66;H05K3/34;(IPC1-7):G01N27/22;B05C19/06;B05C11/10 主分类号 G01R27/26
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