| 摘要 |
<p>A gas supply apparatus capable of rapidly switching the gas to be supplied to an instrument, such as an analyser (A), and preventing reactive gases from mixing with each other, comprises a 4-way blocking valve acting as the main switching valve (10) and having two inflow ports (11, 12) and two outflow ports (13, 14), an instrument connection passage (1) connected to the instrument to which the outflow port (13) is connected, an exhaust passage (4) to which the outflow port (14) is connected, and gas supplying passages (2,3) respectively connected to the two inflow ports (11, 12). The 4-way blocking valve includes valves (15-18) which operate in such a way that when valves (15, 18) are open, valves (16,17) are in the blocking condition, and when valves (15-18) are in the blocking condition, valves (16,17) are shut. A switching valve (20) made of a 2-connected 3-way blocking valve or a second 4-way blocking valve is connected to at least one of the two gas supplying passages (2,3). Two gas supplying passages (21,22) are switchably connected to the 2-connected 3-way blocking valve or the second 4-way blocking valve. An exhaust passage (28) includes a flow rate regulator (28a). The gases may be analysed in succession eg in order nitrogen, hydrogen, argon, oxygen and helium.</p> |
