| 摘要 |
<p>A pressure sensor includes a base unit, a cap-like metal container and a flexible barrier diaphragm. A sensor chip is mounted on the base unit. The metal container is fixed to the base unit so as to seal the sensor chip. Oil is sealed in the metal container. The barrier diaphragm forms part of the metal container to transmit an external pressure by its displacement to the sensor chip through the oil. The base unit has a metal connector, a positioning glass member, an electrode pin and a hermetic seal glass member. The positioning glass member is fitted in the metal connector and made of an insulating material. The electrode pin is supported to extend through the positioning glass member and electrically connected to the sensor chip through a bonding wire. The hermetic seal glass member is formed on the positioning glass member fitted in the metal container to hermetically seal a portion between the metal container and positioning glass member, and a portion between the electrode pin and the positioning glass member. The hermetic seal glass member is made of an insulating material which is softened at a temperature lower than that of the positioning glass member. A method of manufacturing this pressure sensor is also disclosed. <IMAGE></p> |
