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发明名称
Scanning electron microscope
摘要
申请公布号
EP0737997(B1)
申请公布日期
2001.02.07
申请号
EP19960105659
申请日期
1996.04.10
申请人
HITACHI, LTD.
发明人
KANEOKA, NORIYUKI;KAGEYAMA, KANEO;MOURI, ATUSHI;TAKADA, JUNJI
分类号
H01J37/22;H01J37/147;H01J37/15;H01J37/21;H01J37/26;H01J37/28;(IPC1-7):H01J37/28;H01J37/244;H01J37/153
主分类号
H01J37/22
代理机构
代理人
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地址
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