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发明名称
FILM DEPOSITION SYSTEM
摘要
申请公布号
EP1073777(A2)
申请公布日期
2001.02.07
申请号
EP19990918540
申请日期
1999.04.14
申请人
CVD SYSTEMS, INC.
发明人
LOAN, JAMES, F.;SALERNO, JACK, P.
分类号
C23C16/44;C23C16/448;C23C16/458;C23C16/52;C23C16/54;H01L21/205;H01L21/677;(IPC1-7):C23C16/44
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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