Method for generating an elementary plasma in order to produce a uniform plasma for a target surface and device for generating such a plasma

摘要

A tank (1) contains a working surface (Su) and has means to maintain a gas under reduced pressure. Sources of microwave energy (E) located outside the tank and distributed over the working surface send energy along a tube (4) which has a coaxial shielding tube (4') to prevent mutual interference. Magnetic dipoles (5) at the end of the tubes produce electronic oscillation and a uniform plasma adjacent to the working surface (Su)