METHOD FOR MODIFYING SURFACE OF NITRIDE MATERIALS AND SURFACE MODIFIED NITRIDE MATERIALS BY MEANS OF THE SAME

摘要

PURPOSE: A surface modifying method of a nitride materials and a surface modified nitride materials are provided to increase a contact force and to decrease a contact angle of a surface of a polymer by injecting directly a reaction gas into the surface of the polymer while irradiating an ion particle having a high energy into the surface of the polymer. CONSTITUTION: A surface modifying method is performed by injecting directly a reaction gas into a surface of a polymer while irradiating an ion particle having a high energy into the surface of the polymer. The reaction gas is selected form oxygen, nitrogen, hydrogen, ammonium, CO2 or a mixed gas thereof. An injecting amount of the gas is 1¯8 ml/min. The ion particle having the high energy is argon, oxygen, air, krypton or a mixed compound thereof. The energy of the ion particle is 0.5¯2.5 keV. An irradiating amount of the ion particle is 10¬14¯5x10¬16 ions/cm¬2.