发明名称 |
End effector |
摘要 |
An improved end effector includes an end effector body having a proximal end portion and a distal end portion. A contact member is attached to the top surface of the proximal end portion for supporting a substrate over a contact surface area. The contact member spaces the substrate from the end effector body to reduce the contact area between the end effector and the substrate. The contact member is made of a material with a low thermal conductivity. The reduced contact area and low thermal conductivity serve to decrease heat conduction between the contact member and the substrate so as to reduce a temperature gradient and thermal stresses in the substrate caused by the contact. The end effector body includes a plurality of apertures disposed between the proximal end portion and the distal end portion. At least some of the apertures overlap in position with portions of the substrate to provide open areas between blocked portions of the end effector body which overlap in position with the substrate. The open areas facilitate heat transfer by radiation for the substrate to reduce temperature gradient in the substrate caused by the overlap in position between the end effector body and the substrate.
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申请公布号 |
US6183026(B1) |
申请公布日期 |
2001.02.06 |
申请号 |
US19990287325 |
申请日期 |
1999.04.07 |
申请人 |
GASONICS INTERNATIONAL CORPORATION |
发明人 |
CAI LIHONG;MACDONALD DOUGLAS |
分类号 |
H01L21/683;(IPC1-7):B25J15/06 |
主分类号 |
H01L21/683 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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