发明名称 END SURFACE POLISHING DEVICE
摘要 PROBLEM TO BE SOLVED: To allow uniform use of a polishing sheet by polishing an object by a combination of a turning movement and a straight movement. SOLUTION: A bar-like member 4 is polished at its end surface by straight moving a polishing disk 2 right and left while turning it around an eccentric shaft. This turning movement is performed by driving a turning motor 14 for rotating the eccentric shaft and rotating a disk at the top of the eccentric shaft. The movement of the disk eccentrically rotating is transmitted to the polishing disk 2 through a bearing and the polishing disk 2 turns in a state of keeping the certain direction at a predetermined eccentric amount. While the straight movement is performed by driving a sliding motor 18 to rotate a pinion 19 mounted on the tip of the shaft of the sliding motor 18 and by transferring this rotation force to a rack 17 provided for the lower part of a turning disk. Thus, the turning disk is straight moved by a predetermined distance to straight move the polishing disk 2.
申请公布号 JP2001030154(A) 申请公布日期 2001.02.06
申请号 JP20000208867 申请日期 2000.07.10
申请人 SEIKO INSTRUMENTS INC 发明人 EDO TSUKASA
分类号 H01L29/78;B24B7/16;B24B19/00;H01L21/265;H01L21/336;(IPC1-7):B24B19/00 主分类号 H01L29/78
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