| 摘要 |
PROBLEM TO BE SOLVED: To allow high accurate positioning by applying a component force parallel with an air slide specific straight direction to an air slide table. SOLUTION: When a force vertical to a slide direction is applied to an air slide table 2, rectilinear propagation degree of the air slide table 2 floating with an air film degrades. For preventing application of the vertical force as low as possible, the force is released by displacing a driving arm 3 side. The vertical force occurring between the slide table 2 and the driving arm 3 can be absorbed by its movement between a first rail 6a and an intermediate 6b or its movement between the intermediate 6b and a moving portion 6c. Because preload is applied in the table slide direction among a plate 5, a plate 7, and a hard ball 8, rigidity in the table slide direction is high, and a high speed and high accurate positioning is allowed.
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