| 摘要 |
PROBLEM TO BE SOLVED: To improve the clouding-proofness of a formed body. SOLUTION: In a method for producing a formed body provided with a clouding-proof thin film by a stage in which a substrate is installed to the inside of a vacuum tank, a stage in which a target composed of oxide is installed to the inside of the vacuum tank and a stage in which oxide is deposited on the substrate to form a thin film esesentially consisting of inorganic oxide by a sputtering method, as sputtering gas to be introduced into the vacuum tank at the time of the sputtering, inert gas which does not contain oxygen is introduced to form a thin film having clouding-proof capability. |
