| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm-type liquid filling apparatus wherein a driving mechanism of a valve body can be simplified so that adjustment is easy, and even a highly viscous liquid can be accurately supplied and also sucking back is also possible. SOLUTION: A main diaphragm valve 3 including a main diaphragm valve element 4 which can open/close a filling path 2, and a main valve element driver 5 is provided on an upstream of the filling path 2 connected to a filling nozzle 9 to form an aperture 13 on a downstream of the valve 3 of the filling path 2, while bypass paths 17A, 17B connecting between an upstream and a downstream of the aperture 13 are formed. The bypass paths 17A, 17B are equipped with a sub diaphragm valve 6 including a sub diaphragm valve element 7 which can open/close the path 17A and can suck a liquid in the filling nozzle 9 while the valve 3 is closed and a sub valve body driver 8.
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