发明名称 |
Chamber cleaning mechanism |
摘要 |
An apparatus for cleaning a chamber is disclosed. Scraping blades are rotatably mounted within a chamber and parallel to a longitudinal axis of the chamber. The scraping blades are rotated circumferentially within the chamber, scraping the inner surface of the chamber to prevent the buildup of particulate matter. An annular gear assembly provides mounting support for the scraping blades. A pneumatically operated pushrod assembly rotates the scraping blades circumferentially within the chamber. The annular gear assembly and pushrod assembly do not obstruct a direct path through the chamber.
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申请公布号 |
US6182325(B1) |
申请公布日期 |
2001.02.06 |
申请号 |
US19980041054 |
申请日期 |
1998.03.10 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
HERMAN TIMOTHY L. |
分类号 |
B08B9/049;B01D45/18;F22B37/48;F23J3/00;F23J3/02;F28F19/00;F28G9/00;(IPC1-7):B08B9/027 |
主分类号 |
B08B9/049 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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