PRODUCTION OF SINGLE CRYSTALLINE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a single crystalline thin film excellent in crystal orienting properties. SOLUTION: This method for producing a single crystalline thin film comprises a step of locating a target 2 at a position separated and isolated from a substrate 1 so that the principal surface 2a of the target 2 forms an acute angle to the principal surface 1a of the substrate 1 and a step of irradiating the target 2 with laser beams 3 at >=0.8 and <=10 J/cm2 energy density and >=50 and <=280 Hz frequency, thereby scattering a substance constituting the target 2, depositing the substance constituting the target 2 on the principal surface 1a of the substrate 1 and forming the single crystalline thin film.