| 摘要 |
PROBLEM TO BE SOLVED: To enlarge surface area of a separation membrane and to improve gas permeation speed by a method wherein an uneven pattern structure is formed by a three-dimensional ultrafine processing means and a substrate of the membrane such as an inorg. porous body with a number of uneven parts by using a mold prepd. by an electric casting method based on this and the separation membrane is formed on this surface. SOLUTION: When a gas separation membrane is prepd., palladium, etc., is used as a raw material and the LIGA process being an example of three- dimensional ultrafine processing means used for preparation of a micromachine, etc., is used. At first, a structure with a specified uneven pattern (a female mold) is prepd. and a male mold 5 made of a metal is prepd. by using this as a casting mold and by means of electrolytic plating using nickel, etc., as a raw material. Then, a raw material such as ceramic is cast into the male mold 5 to mold a porous membrane substrate 7 with an arrangement 6 of a number of cylindrical projections. Successively, the gas separation membrane is formed on the substrate 7. Effective surface area is thereby enlarged by forming a number of uneven three-dimensional patterns on the gas separation membrane and amt. of gas permeation is increased.
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