| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device and a method for irradiating the laser beam used in forming a conductive circuit of a three-dimensional substrate, and an image pick-up device used in the surface inspection of a work. SOLUTION: The laser beam irradiation device comprises a jig table 2 with a three-dimensional substrate 1 fixed to its upper surface, an actuator 3 to control the position or posture of the jig table 2, and a laser beam oscillator 4 arranged above the jig table 2 to radiate the laser beam 4a, a mirror 5 is provided on the upper surface of the jig table 2 so that the laser beam 4a radiated from the laser beam oscillator 4 is reflected by the mirror 5 to irradiate the laser beam 4a on a surface on the reverse side of the three-dimensional substrate 1 which can not irradiate the laser beam directly from the laser beam oscillator 4. A through hole is formed in the three-dimensional substrate 1, the mirror 5 is irradiated with the laser beam 4a via the through hole, and the surface on the reverse side of the three-dimensional substrate 1 incapable of irradiating the laser beam 4a directly from the laser beam oscillator 4 is irradiated with the laser beam 4a.</p> |
