发明名称 |
Exposure unit, exposure system and device manufacturing method |
摘要 |
A network type exposure unit connected via a communication network to other exposure units or to an information processor determines whether or not exposure work information of the instructed kind of exposure work is in the storage thereof. When the instructed exposure work information is determined to be non-existent, the unit inquires of the other exposure units or a host equipment whether or not there is therein the exposure work information, and decides executability of the exposure work requested to be started from the result thereof. The exposure work information can be transferred between arbitrary units, thereby alleviating complexity of maintenance and management of the exposure work information.
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申请公布号 |
US6185474(B1) |
申请公布日期 |
2001.02.06 |
申请号 |
US19980034019 |
申请日期 |
1998.03.02 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
NAKAMURA TAKASHI;YAMADA YASUYOSHI;KYOTOKU SATOSHI |
分类号 |
G03F7/20;(IPC1-7):G05D1/00;G06F19/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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