发明名称 |
Method of fabricating the coating |
摘要 |
In an apparatus for fabricating a carbon coating, an object such as a magnetic recording medium is disposed on a side of an electrode connected to a high-frequency power supply. Ultrasonic vibrations are supplied to the object. Discharge is generated between the electrode connected to the high-frequency power supply and a grounded electrode to fabricate a carbon coating on the surface of the object. Also, an electrode interval is set to 6 mm or less, pressure between the electrodes is set to 15 Torr to 100 Torr, whereby high-density plasma is generated to form an ion sheath on an anode side. Therefore, a coating is fabricated on the surface of the object by bombardment of ions.
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申请公布号 |
US6183816(B1) |
申请公布日期 |
2001.02.06 |
申请号 |
US19970998008 |
申请日期 |
1997.08.13 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI SHUNPEI;ITOH KENJI;HAYASHI SHIGENORI |
分类号 |
G11B7/254;C23C16/26;C23C16/27;C23C16/509;C23C16/54;G11B5/72;G11B5/74;G11B5/78;G11B5/82;G11B5/84;G11B7/005;G11B7/24;G11B7/257;G11B11/105;(IPC1-7):C23C16/50 |
主分类号 |
G11B7/254 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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