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发明名称
摘要
申请公布号	JP2001501728(A)	申请公布日期	2001.02.06
申请号	JP19980510430	申请日期	1997.08.22
申请人		发明人
分类号	G01N31/20;B01J19/00;C12M1/00;C12N15/09;C12Q1/00;H01L21/312;(IPC1-7):G01N31/20	主分类号	G01N31/20
代理机构		代理人
主权项
地址

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