| 摘要 |
<p>A method for testing a Coriolis transducer (10) having a mass (14) adapted to vibrate along a vibratory direction, here axis (21), in a resonant structure (47) and undergo a displacement along a sensitive axis (27) perpendicular to the vibration, in response to an angular rate about a mutually perpendicular rate sensing axis (25). In the absence of an angular rate forces are applied on the mass along the direction of vibration and along the sensitive axis, in a predetermined ratio, N. The output of the transducer is measured in response thereto. With such method, a knowm test input angular rate is simulated. Thus the proportionality constant K can be calculated without expensive rate table testing. Further, because the test can be performed with a transducer prior to packaging, electronics integrally formed on the same semiconductor wafer of the mechanical transduction structure can be easily trimmed to provide a desired proportionality constant K.</p> |
