Production of a texture layer made of an oxide material on a substrate comprises partially fading out sputter ions that are scattered back from the sputtering target so that the larger part

摘要

Production of a texture layer made of an oxide material on a substrate (9) comprises sputtering a target. During coating, a stream of gas ions are directed onto the substrate at a predetermined angle. Sputter ions (11) that are scattered back from the sputtering target (7) are partially faded out so that the larger part of the back-scattered ions hit the edge region of the surface of the substrate.