DEVICE FOR RAPIDLY MEASURING ANGLE-DEPENDENT DIFFRACTION EFFECTS ON FINELY STRUCTURED SURFACES

摘要

The invention relates to a device for measuring angle-dependent diffraction effects, comprising a coherent radiation source (1), a device for deflecting the coherent radiation (2) in different directions, a spherical or non-spherical mirror, or mirror segments which are arranged in such a way that they correspond to a spherical or non-spherical mirror (3) and a detector unit (4) for measuring the intensity of the radiation which is deflected onto a sample. The device is characterised in that the radiation which is deflected in different directions is reflected by the mirror arrangement in such a way that the coherent beam is successively deflected onto the sample and falls each time with a different angle of incidence. The angle of incidence of the measurement beam is thus modified continuously or by degrees. The intensities of the direct reflection (zero diffraction order) and the optionally occurring higher diffraction orders are measured. The evaluation of the progression of intensity in relation to the varied angle of incidence enables conclusions to be drawn concerning the form and material of the examined periodic structures.