| 摘要 |
A method of producing a ceramic diaphragm structure (2) including a ceramic substrate (4) having at least one window (6), and a ceramic diaphragm plate (8) which is superposed on the ceramic substrate to close the window or windows. The diaphragm plate includes at least one diaphragm portion (10) which is respectively aligned with the window(s), and each diaphragm portion protruding outwards, in a direction away from the corresponding window, to form a convex shape. According to the method of the present invention, a jig (14, 15, 22, 23) having a flat surface or a concave surface is pressed against a top part of each diaphragm portion (10), during or after formation of the convex shape of the diaphragm portion, so that at least the top part has a flat surface (10a) or a curved surface (10b) having a predetermined radius of curvature, thereby to control an amount of protrusion of the diaphragm portion. |
