| 摘要 |
<p>The parallel detecting spectroscopic ellipsometer/polarimeter sensor (10) has no moving parts and operates in real-time for in-situ monitoring of the thin film surface properties of a sample (22) within a processing chamber. It includes a multi-spectral source of radiation (12) for producing a collimated beam of radiation (14) directed towards the surface of the sample through a polarizer (16). The thus polarized collimated beam of radiation impacts and is reflected from the surface of the sample (22), thereby changing its polarization state due to the intrinsic material properties of the sample (22). The light reflected from the sample (22) is separated into four separate polarized filtered beams (36, 38, 58, 62), each having individual spectral intensities. Data about said four individual spectral intensities is collected within the processing chamber, and is transmitted into one or more spectrometers. The data of all four individual spectral intensities is then analyzed using transformation algorithms, in real-time.</p> |
