RETAINING RING AND TARGET AND METHOD FOR PRODUCING SAME

摘要

The holding ring (2) for fixing a target plate (1) in a holding unit (4) of a process chamber has several radial anchoring protrusions (3) which are distributed over its outer circumference, and are provided with fixing surfaces (5). On the inner side, the holding ring is provided with a circumferentially running shoulder (8) facing the underside of the ring. Preferred Features: The target plate is provided with a circumferentially running shoulder (7) which lies against the shoulder (8) of the holding ring. The shoulder of the target plate is produced by a turning operation.