Verfahren und Vorrichtung zum Transportieren eines Halbleiterwafers durch einen Behandlungsbehälter

摘要

The aim of the invention is to provide a simple and inexpensive means for guaranteeing a homogeneous and good treatment of substrates. To this end, the invention provides a device and a method for transporting a substrate through a treatment container that has a width in the direction of transport of the substrate that is smaller than the diameter of the substrate. The substrate is partially transported through the treatment container by means of a first transport element that is mounted in the direction of transport of the substrate. It is then picked up by a second transport element that is located behind the treatment container in the direction of transport of the substrate and is pulled through the container.