发明名称 |
Test head for microstructures with interface |
摘要 |
The test head has several contact elements (25) which electrically connect with a connector element (11) of a test apparatus. The contact elements are arranged in a guide so as to axially movable in an associated opening in the guide. One end of each contact element is directed to a contact point of the connector element. The other end can be directed to a respective test point of the test piece. The contact elements are secured on the openings so that they do not fall out. The connector element and the contact device are releasably connected together by fastening means (9). |
申请公布号 |
EP0915344(A3) |
申请公布日期 |
2001.01.31 |
申请号 |
EP19980120166 |
申请日期 |
1998.10.28 |
申请人 |
FEINMETALL GMBH |
发明人 |
GIRINGER, KLAUS;SCHMID, RAINER;DEUSCH, HEINZ-LUDWIG;GAUSS, ULRICH |
分类号 |
G01R1/073;G01R31/28;H01L21/66 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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