High rpm megasonic cleaning

摘要

A method that involves spraying a liquid agitated with a sonic wave at a megasonic frequency onto a substrate from a nozzle positioned over the substrate. Simultaneously, the substrate is spun above 300 RPM while the nozzle is swept over the substrate. The substrate may be brushed in a brush station before agitating the liquid with the sonic wave. An apparatus having an arm in fluid communication with a nozzle that has an angular position theta greater than 0°. Also, there is a substrate spinner positioned below the nozzle.