Web particle removal method and apparatus

摘要

A part of a drive roller (16), whose peripheral surface is coated with an elastic body (14), is immersed in a cleaning liquid (22), and the rotation of the drive roller (16) causes the surface of the elastic body (14) to be wet with the cleaning liquid (22). The elastic body (14) wet with the cleaning liquid (22) continuously rubs a surface of a film (10) being fed. Then, a wash nozzle (18) sprays a cleaning liquid to the surface that has been rubbed by the elastic body (14). A shearing stress of the elastic body (14) rubs off foreign matter adhering to the film (10). The foreign matter that has not been rubbed off by the elastic body (14) is washed off by the cleaning liquid sprayed from the wash nozzle (18).