发明名称 Semiconductor memory device having a capacitor over bitline structure and method for manufacturing the same
摘要 A semiconductor memory device having an improved step profile between a cell array region and peripheral circuit region, and a method for manufacturing the same, are provided. The semiconductor memory device has a cell array region and a peripheral circuit region surrounding the cell array region. The cell array region includes a plurality of cell capacitors each of which comprises a cell storage electrode and a plate electrode, and a plurality of dummy cell capacitors each of which comprises a dummy storage electrode and a plate electrode. The dummy cell capacitors are formed at the edges of the cell array region. The outermost sidewall of each dummy storage electrode, facing toward the peripheral circuit region, has an inclined profile.
申请公布号 US6180448(B1) 申请公布日期 2001.01.30
申请号 US19980154783 申请日期 1998.09.17
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE JOO-YOUNG
分类号 H01L21/02;H01L21/8242;H01L27/108;(IPC1-7):H01L21/824;H01L21/823;H01L21/20;H01L21/476 主分类号 H01L21/02
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