摘要 |
PROBLEM TO BE SOLVED: To produce a target for forming a Co-Pt-B magnetic film formed of the stock having fine crystal grain size and to provide a method for producing it. SOLUTION: This target is composed of 10>=B>=1 at% and 30>=Pt>=5 at%, and the balance substantial Co, in which the average crystal grain size of the matrix is <=50μm, and borides present in the structure are dispersed in layers in the case of being viewed in the cross-section of the target. Preferably, it is incorporated with 30>=Cr>=10 at%, 7>=Ta>0 at%, 30>=Ni>=5 at% and 5>=(Ti+ Zr+Hf+V+Nb+Mo+W+Cu+Ag+Au)>0 at%. Moreover, as to the target having the above compsn., by subjecting the stock composed of 10>=B>=1 at% and 30>=Pt>=5 at%, and the balance Co to hot rolling, the average crystal grain size of the matrix can be controlled to <=50μm, and borides present in the structure can be dispersed in layers in the case of being viewed in the cross-section of the target.
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