SCANNING PROBE MIROSCOPE AND MEASURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To enable reliable measurement high in S/N in a scanning probe microscope measuring the surface state or surface vol. distribution of a sample. SOLUTION: A shield plate 1 covering a sample 25 and having an opening 11 exposing the contact region with a probe needle 2a of the sample is provided between a conductive cantilever 2 having the probe needle 2a coming into contact with the surface of the sample provided to one end thereof and the sample 25 and the vol. generated between the sample 25 and the cantilever 2 or the opening 11 is made as possible as small to eliminate a parasitic vol.