发明名称 WAVELENGTH-STABILIZED COHERENT LIGHT SOURCE
摘要 PROBLEM TO BE SOLVED: To obtain a wavelength-stabilized coherent light source capable of wavelength-stabilized control at high speed by specifying an arbitrary wave length. SOLUTION: Part of output light of a semiconductor laser 1 capable of variably controlling the wavelength with current is split with a beam splitter 3 and introduced to a interference optical system 5. For modulating an interference pattern obtained by giving variation to the light path length difference of two light fluxes in an interference optical system 5, AOM 54 and 55 are arranged on the two split light paths, and EOM 56 is arranged on one. The interference pattern obtained with the interference optical system 5 is received with a light receiving element 7, the obtained light receiving signal phase is detected with a phase detection circuit 8 and phase amplitude is extracted with an amplitude extraction circuit 9. The wavelength is stabilized by feedback-controlling the injection current of the semiconductor laser 1 with a control circuit 10 so that the phase amplitude becomes a specific set value.
申请公布号 JP2001027512(A) 申请公布日期 2001.01.30
申请号 JP19990200688 申请日期 1999.07.14
申请人 MITSUTOYO CORP 发明人 NISHIOKI NOBUHISA;OKAMOTO KIYOKAZU
分类号 G01B9/02;G01B11/02;H01S5/0687;(IPC1-7):G01B11/02 主分类号 G01B9/02
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