| 摘要 |
PROBLEM TO BE SOLVED: To grind a diamond or a self-standing diamond film formed on a substrate by a vapor phase synthesis method at a low temperature without degrading the quality, to maintain the stable performance of a grinding material, to use a conventional grinding device in surface grinding, and to efficiently grind a member covered by the three-dimensional diamond film. SOLUTION: In this diamond grinding method, a diamond grinding wheel consisting mainly of an intermetallic compound of Ti and one or two or more kinds of elements selected from a group of Al, Cr, Mn, Fe, Co, Ni and Cu is pressed against a relatively rotating or moving diamond and ground while keeping the grinding wheel at room temperature or heating a grinding part at 100-800 deg.C as necessary.
|
