ELECTRONIC PROBE MICROANALYZER

摘要

PROBLEM TO BE SOLVED: To provide an electronic probe microanalyzer constituted so as to be capable of recognizing a correlation between the positional and geometrical characteristics of particles to be measured and the chemical compositional characteristics of them at a glance. SOLUTION: An electronic probe microanalyzer is constituted by providing a analysis control device 8 performing the analysis of particles using electron beam on the basis of the positional and geometrical characteristics of particles obtained by the particle analysis of an electron image, a device 13 for detecting characteristic X-rays generated by the irradiation of a sample with controlled electron beam to perform the analysis of particles and a display device 14 allowing the chemical type of particles and the position and shape of particles to correspond to each other on the electron image of a sample to discriminate and display them.