| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable more highly accurate and efficient measurement by setting a conductive mask to a sample surface and providing a means for impressing a bias to the mask. SOLUTION: A conductive mask 2 is placed in the vicinity of a charge-up point of an insulating sample 1, thereby increasing a passive charge-up easing margin. An ionizing radiation is irradiated also to the conductive mask 2, thereby positively easing the charge-up by generation of photoelectrons 6 from the conductive mask 2. The charge-up easing margin is increased as a whole. Signals from the insulating sample 1 and conductive mask 2 are separated by impressing a bias to the conductive mask 2. Moreover, the photoelectrons 6 emitted from the conductive mask 2 are separated by impressing the bias to the conductive mask 2. The bias to be impressed to the conductive mask 2 is adjusted not to increase a background intensity of a photoelectron peak of a target element. The charge-up can be eased without losing a determination accuracy.</p> |
