| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for display, which is capable of preventing occurrence of abnormality in an element caused by thermal diffusion of movable ions even when it is produced by a high temp. process and preventing lowering of the life of the element caused by electrification of the substrate. SOLUTION: A passivation film 11 (film for preventing diffusion of movable ions) is formed on the surface of the device side of a glass substrate 10 by a sputtering method, a CVD method, a dipping method or the like in order to intercept the thermal diffusion of Na ions in the substrate 10 to the surface of the device side of the substrate 10. The substrate 10 is made of soda lime glass and has the thickness of, e.g., 2 mm. The passivation film 11 is formed from an oxynitride (SiON) of silicon and has the thickness of, e.g. 1,000 nm. The Na-diffusion inhibiting capacity of the passivation film 11 is in the range of <=2,000 ppm and the passivation film 11 has a surface resistance of 1.0×107 to 1.0×1015Ω/(square), preferably, 1.0×107 to 1.0×1012Ω/(square).
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