| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing system for which the cassette delivery time is shortened, the floor space for the system is decreased and its price is also reduced by causing a cassette loader to receive cassettes directly from a cassette delivery unit. SOLUTION: A substrate processing system 21 comprises a cassette-mounting section 30 for mounting an externally delivered cassette, a cassette loader 37 for transferring the cassette within the system 21, and a cassette delivery unit 27 for receiving and delivering the cassette between the loader 37 and the section 30. In the system 21, the unit 27 has a base that allows the cassette to move downward from the section 30, has a retractable frame that moves forwards and backwards in the horizontal directions between the cassette delivering position, with respect to the loader 37 and the position to which the cassette was lowered vertically. The retractable frame has a cassette support section that supports the cassette in suspended state. |
