发明名称 Transport module with latching door
摘要 A wafer container with door receiving frame and a door sized therefor. The door (94) includes latching linkages (250, 252) that extend, lift, lower and retract latching portions from the door and into and out of latch receptacles (150) in the door frame. Each latching mechanism utilizes a sliding plate (210) with a connected handle (170, 172) exposed on the front of the door. The sliding plate has lifting linkages (220, 222) cooperating with the latching linkages. Moving the handles extends the latching portions into the latching receptacles. By way of a ramped surface (226) and follower surface (277) on the overlapping linkages, the latching portions then move in a direction normal to the first direction to pull the door inwardly and seal the door to the container. The sliding plate includes a rack portion (224) engaged with a pinion (290). The pinion is accessible from the door front by a latch key (300).
申请公布号 AU6341900(A) 申请公布日期 2001.01.30
申请号 AU20000063419 申请日期 2000.07.06
申请人 FLUOROWARE, INC. 发明人 GREGORY W. BORES;MICHAEL C. ZABKA
分类号 H01L21/673 主分类号 H01L21/673
代理机构 代理人
主权项
地址