| 摘要 |
PROBLEM TO BE SOLVED: To simplify the interconnection, the detection circuit and the like of a probe and a detecting system and to establish a method for the detection and observation of a surface characteristic and an electric characteristic by a multiprobe, by a method wherein a current which flows in a piezoresistance and a current which flows across a medium and a conductive probe are detected by a common current passage. SOLUTION: The path of a current for an AFM flowing in a piezoresistance in order to detect the surface characteristic of a medium, and the path of a current for an STM flowing across the medium and a conductive probe in order to detect the electric characteristic of the medium, are constituted of the same path. A lever-type probe 201 is brought close to a sample 202 to be observed, and a force acts mutually by an atomic force or the like. When a scanning signal is generated by a scanning-signal generation part 207, a stage is driven to the in-plane direction of the sample to be observed, the probe 201 relatively scans the in-plane of the sample to be observed, and the piezoresistance is changed. A prescribed voltage is applied, and the probe 201 is brought close to the sample 202 to be observed by an approach control part 209 within a certain distance. Then, a tunnel current flows. On the basis of the current, the local electric state of the sample to be observed can be grasped. |
