发明名称 |
Microejector pump |
摘要 |
A microejector pump for generating microdrops includes at least one pump chamber configured in a silicon chip and a piezoelectrically actuable silicon membrane arranged over the pump chamber. The pump chamber is connected to at least one supply line as well as a discharge line provided with an ejection orifice. A glass chip closes off at least the pump chamber from the silicon membrane. The microejector pump can also include an integral heater and controller. |
申请公布号 |
US6179584(B1) |
申请公布日期 |
2001.01.30 |
申请号 |
US19990330121 |
申请日期 |
1999.06.10 |
申请人 |
GESIM GESELLSCHAFT FUR SILIZIUM-MIKROSYSTEME MBH |
发明人 |
HOWITZ STEFFEN;WEGENER THOMAS;BURGER MARIO;GEHRING THOMAS |
分类号 |
B81B3/00;F04B43/04;F04B53/08;(IPC1-7):F04B17/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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