发明名称 ACTIVE DAMPING DEVICE
摘要 PROBLEM TO BE SOLVED: To suppress horizontal relative displacement in the vertical position of an equipment caused by vibration, particularly horizontal relative displacement due to the vibration of an equipment body caused by an exiting source in the mounted equipment. SOLUTION: This active damping device is constituted including a base 4 supported by active damping mounts 3 each formed by integrating a passive damping member comprising a cylindrical elastic body 23 and a viscous elastic body 30a, a vertical actuator 32a supported by a height adjusting mechanism 55 disposed in the cylindrical elastic body 23, and a horizontal actuator 32b, an active mass damper 20 provided at an equipment 50 mounted on the base 4, a vibration sensor 17 for detecting the vibration of the base 4 and equipment 50, an equipment controller 9 for driving an exciting source mounted in the equipment 50, and a vibration damping controller 18 for controlling the actuators 32a, 32b, 32c on the basis of the output of the vibration sensor 17.
申请公布号 JP2001027280(A) 申请公布日期 2001.01.30
申请号 JP19990199751 申请日期 1999.07.14
申请人 HITACHI LTD 发明人 KURIHARA MASAKI;HORIUCHI TOSHIHIKO;OOTAKE IKUMORI;KONNO TAKAO;NAKAMURA TOMIO
分类号 H01J37/16;F16F7/10;F16F9/04;F16F15/02;G03F7/20;G05D19/02;H01L21/027;(IPC1-7):F16F15/02 主分类号 H01J37/16
代理机构 代理人
主权项
地址