| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the sensitivity of flow velocity detection from being reduced, to suppress the difference between zero-point and substitution zero adjustment, and to accurately detect the flow velocity even when dust or the like adheres. SOLUTION: A membrane part 5' is composed of a first membrane part 5c being isolated by two slit-shaped openings 13 and 14, a second membrane part 5d, and a third membrane part 5e. On the surfaces of the first, second, and third membranes 5c, 5d, and 5e, a temperature-sensing resistance element (first temperature-sensing resistor) 8, a heat element (an electrical heating element) 7, and a temperature-sensing resistance element (second temperature- sensing resistor) 9 are formed, respectively.</p> |
